2

Reversible photodimerization of amphiphilic thymine derivative in Langmuir-Blodgett films

Année:
1991
Langue:
english
Fichier:
PDF, 222 KB
english, 1991
13

Imaging results for resist films exposed to EUV radiation

Année:
2002
Langue:
english
Fichier:
PDF, 550 KB
english, 2002
39

New Protective Groups in Alicyclic Methacrylate Polymers for 193-nm Resists.

Année:
1997
Langue:
english
Fichier:
PDF, 430 KB
english, 1997